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| ACID chemicals easily damage the surface |
SALTs base technology
minimize any damage on surface |
| Hazardous & Dangerous chemicals |
Drastic improvement in safety |
Rugged surface becomes
particle adhesion area |
Superior cleaning capability &
Minimum surface damage |
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is liquid where gases are dissociated in water
Characteristics
- Hazardous liquid
- Toxic fume
- HF is remarkably corrosive useful for etching metal surface
ex) HF, HCl, HNO3, H2SO4, etc… |
is ionic compound formed from the reaction between an Acid and a base.
Characteristics
- Less corrosive
- Has the power to disintegrate or wear away a material from the surface
ex) NH4HF2, NH4Cl etc… |
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HF Solution |
OXST Solution |
| Concept |
· Colorless, volatile liquid
· Cause burn on skin and mucosa
· Simulating to respiratory organs and
eyes
· No breathing vapor or mist allowed
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· Colorless and odorless fluid. |
| Breathing in |
· Causes burn, chest pain , breathing difficulties, bleeding in lungs, injuries
in heart and kidneys. |
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| Eye touch |
· May cause serious hurt and may loose eye-sight.
· May cause a burn on cornea. |
· May cause serious stimulation
occasionally.
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| Drinking |
· To death |
· Doctors’ medication |
| Exposure limit |
· below 3ppm |
. Safe |
| Reaction |
· Poisonous and corrosive vapor |
· No reaction in normal temperature. |
| Skin touch |
· May become irrecoverable ulcer.
· May destroy the cartilaginous softening
of the bones.
· Exposure in gas may cause outer skin
peel off |
· Become red.
· May cause pain
and may leave burn scars.
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· Working environment & operators friendly
· Small amount of exhausted gases
· Less volume of waste water and easy waste treatment
· Effective deposition strip lead to less particles
· Minimum base material attack |
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| Proven Items: N2 Shield, Pumping Bellows, Pumping Port, U-Line, ISO V/V Housing, ISO V/V, Inner Door Bellows,
Bellows, Vac’ Bellows, C/M Port Manifold, HOT V/V Bellows,R/V Housing, Star Ship, T/V Housing, T/V Bellows,
Center Ring , He Dump Line Multi Trap Filter, MV Filter, Mesh Filter, MPS Elbow, Main V/V Bellows, other SUS parts |
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| · Comparison of Technology |
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| · Comparison of the processed image: N2 Shield |
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Proven Items : Capture Ring, Filler Ring, Bell Jar, Insulator, Space Ring, Focus Ring, Dome, Depo’ Shield Ring, Gas
Nozzle, Injection, Clamp Ring, Outer/Inner Ceramic, Shower Head, Purge Ring, Lift Pin, Shadow Ring, Adaptor Ring, other Ceramic parts |
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| · Comparison of Technology |
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| · Comparison of the processed image: Capture Ring |
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| Proven Item : Diffusion Quartz Tube (Inner/Outer), Quartz Boat, Focus Ring, Guide Ring, Pedestal, Bell Jar, Window, Injection Nozzle, Tube, Boat, Liner Top, GDP, other Quartz parts |
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| · Comparison of Cleaning Test for Si3N4 Film on Quartz Tube ( HF VS QNST Solution) |
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| · Comparison of Cleaning Method for Poly-Si film on Quartz Tube (HF+HNO Vs QPST Solution) |
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Proven Items : Shower Head, Mixing Block, Blocker Plate, Buffer Plate, Bell Jar Plate, Tunnel Main Body, Baffle,
Wxz Heater, Chamber Upper/Lower, Door, Cathode, ESC, GDP, Pumping, Plate, Cooling Plate, Thermo Couple Cover,
Supporter, Screw, other Al Parts |
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| · Comparison of Technology |
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| · Comparison of the processed image: Shower Head |
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